M4D - Two-Photon-Polymerisation
Direct laser writing by two-photon polymerization (2PP) of photoresists is an emerging technique for the fast and flexible fabrication of fully three-dimensional (3D) structures with structure sizes down to less than 100 nm. The M4D micro- and nanostructuring system enables high-speed generation of 2D and 3D micro- and nanostructures over large areas and volumes.
Applications
- Microfludics
- Biology
- Medicine
- Microoptics
- Micromechanics
- 3D Free-form structuring
- 2D Surface structuring
TECHNOLOGIES
- Polymerization of photoresists with femtosecond laser
- Submicrometer resolution with two-photon polymerization
- Micro- and nanostructuring
MATERIALIEN
- Our optimized photoresists for 2PP: femtoBond®
- Standard photoresists for lithography
- Biodegradable and biocompatible photoresists
FAKTEN
- Rapid Prototyping from Nanometer to Millimeter
- Key technology for 3D nano rapid prototyping
- For research and development
PARAMETERS
|
Resolution |
100nm – 100µm |
|
Positioning Speed (typical) |
up to 50 mm/s |
|
Scanning Speed (typical) |
up tp 1 m/s |
|
Polymerization Volume (typical) |
10cm x 10cm x 10cm |
|
Lasertypes |
Ultrashort Lasers |
|
System |
Open Design, customer specific |
|
Footprint |
ca. 1 m² |
Configuration example
|
femtosecond pump laser wavelength |
1030nm |
|
pump laser power |
10W |
|
pump laser rep. rate |
1kHz to 1 MHz |
|
pump laser pulse duration |
290 fs-10 ps |
|
second harmonic generator: |
|
|
laser output power |
>0.7 W |
|
pulse duration |
< 100 fs |
|
wavelength |
515 nm |
|
repetition rate |
75 MHz ± 1 |
|
linear axes |
air-bearing |
|
bidirectional repeatibility |
< ±0,075 µm |
|
speed (w/o load) |
(XY) 2m/s , (Z) 1m/s |
|
objective |
NA 0.5 |
|
2PP-structure height (Z) |
WOW-2PP prepared, structure height in Z only limited by the travel of the Z-axis |
|
software |
can be extended with own Visual Studio modules |
Other configurations are available.